Nanometer-scale Mechanical Processing of Muscovite Mica and Application to High-Density Memory

Document

Metadata

Author(s)

Miyake, S. | Asano, M.

DOI

10.1541/ieejsmas.120.8

Title

Nanometer-scale Mechanical Processing of Muscovite Mica and Application to High-Density Memory

Item Type

journalArticle

"Key

8Q36PL5L

Publication Year

2000

Publication Title

IEEJ Transactions on Sensors and Micromachines

ISSN

13418939 (ISSN)

Url

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84901808379&doi=10.1541%2fieejsmas.120.8&partnerID=40&md5=7f66a38d6b35c1c5a76f2206c7d0da86

Date

2000

Pages

8-14

Issue

1

Volume

120

Language

English

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